15

Study of reactive DC magnetron sputtering deposition of AlN thin films

Year:
1998
Language:
english
File:
PDF, 443 KB
english, 1998
16

Ion plasma sputtering of multi-component materials

Year:
1998
Language:
english
File:
PDF, 264 KB
english, 1998
26

848

Year:
2013
Language:
english
File:
PDF, 1.50 MB
english, 2013
27

847

Year:
2013
Language:
english
File:
PDF, 1.50 MB
english, 2013