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51

Hot plasma effects in gas discharge plasma

Journal:

Physics of Plasmas

Year:

2005

Language:

english

File:

PDF, 407 KB

english, 2005

52

Effect of the electron thermal motion on the ponderomotive force in inductive plasma

Smolyakov, A. I., Godyak, V., Tyshetskiy, Y.

Journal:

Physics of Plasmas

Year:

2001

Language:

english

File:

PDF, 296 KB

english, 2001

53

Ferromagnetic enhanced inductive plasma sources

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 4.95 MB

english, 2013

54

[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - Nonlinear skin effect in inductive discharge

Godyak, V.A., Piejak, R.B., Alexandrovich, B.M., Smolyakov, A.I.

Year:

2000

Language:

english

File:

PDF, 58 KB

english, 2000

55

[IEEE IEEE 29th International Conference on Plasma Sciences - Banff, Alta., Canada (26-30 May 2002)] IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) - Non-linear effects in ICP: theory and experiments

Smolyakov, A.I., Godyak, V.A., Tyshetskiy, Yu.O.

Year:

2002

Language:

english

File:

PDF, 78 KB

english, 2002

56

Radio frequency potential of inductive plasma immersed in a weak magnetic field

Godyak, V. A., Alexandrovich, B. M.

Journal:

Applied Physics Letters

Year:

2004

Language:

english

File:

PDF, 320 KB

english, 2004

57

Plasma and electrical characteristics of inductive discharge in a magnetic field

Godyak, V. A., Alexandrovich, B. M.

Journal:

Physics of Plasmas

Year:

2004

Language:

english

File:

PDF, 315 KB

english, 2004

58

Electromagnetic field structure in a weakly collisional inductively coupled plasma

Godyak, V. A., Piejak, R. B.

Journal:

Journal of Applied Physics

Year:

1997

Language:

english

File:

PDF, 266 KB

english, 1997

59

Determination of Ar metastable atom densities in Ar and Ar/H 2 inductively coupled low-temperature plasmas

Fox-Lyon, N, Knoll, A J, Franek, J, Demidov, V, Godyak, V, Koepke, M, Oehrlein, G S

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 518 KB

english, 2013

60

Electron energy distribution function control in gas discharge plasmas

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 3.06 MB

english, 2013

61

[IEEE International Conference on Plasma Sciences (ICOPS) - Vancouver, BC, Canada (1993.06.7-1993.06.9)] International Conference on Plasma Sciences (ICOPS) - Paradoxical electron temperature spatial distribution in a low pressure RF discharge

Godyak, V.A., Piejak, R.B.

Year:

1993

Language:

english

File:

PDF, 126 KB

english, 1993

62

Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge

Godyak, V A, Piejak, R B, Alexandrovich, B M

Journal:

Plasma Sources Science and Technology

Year:

1994

Language:

english

File:

PDF, 605 KB

english, 1994

63

On nonlocal heating in inductively coupled plasmas

Tyshetskiy, Yu O, Smolyakov, A I, Godyak, V A

Journal:

Plasma Sources Science and Technology

Year:

2002

Language:

english

File:

PDF, 113 KB

english, 2002

64

Effective electron collision frequency and electrical conductivity of radio frequency plasmas

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.

Journal:

Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 339 KB

english, 1999

65

Experimental Evidence of Collisionless Power Absorption in Inductively Coupled Plasmas

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M., Kolobov, V. I.

Journal:

Physical Review Letters

Year:

1998

Language:

english

File:

PDF, 128 KB

english, 1998

66

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Effect of Magnetic Field on Plasma Density Distribution

Godyak, Valery, Sternberg, Natalia, Hoffman, Daniel

Year:

2005

Language:

english

File:

PDF, 763 KB

english, 2005

67

In situ simultaneous radio frequency discharge power measurements

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1990

Language:

english

File:

PDF, 593 KB

english, 1990

68

Reduction of Electron Heating in the Low-Frequency Anomalous-Skin-Effect Regime

Tyshetskiy, Yu. O., Smolyakov, A. I., Godyak, V. A.

Journal:

Physical Review Letters

Year:

2003

Language:

english

File:

PDF, 148 KB

english, 2003

69

Distributed Ferromagnetic Inductively Coupled Plasma as an Alternative Plasma Processing Tool

Godyak, Valery, Chung, Chin-Wook

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 283 KB

english, 2006

70

Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

Lee, Kyeonghyo, Lee, Youngkwang, Jo, Sungwon, Chung, Chin-Wook, Godyak, Valery

Journal:

Plasma Sources Science and Technology

Year:

2008

Language:

english

File:

PDF, 459 KB

english, 2008

71

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Godyak, V. A., Piejak, R. B.

Journal:

Physical Review Letters

Year:

1990

Language:

english

File:

PDF, 214 KB

english, 1990

72

[IEEE IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - Tampa, FL, USA (1-3 June 1992)] IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - The Electrode Sheath Width In RF Discharges: A Coinparison Of Analytic Models And Experimental Measurements

Piejak, R.B., Godyak, V.A., Alexandrovich, B.M.

Year:

1992

File:

PDF, 87 KB

1992

73

[IEEE IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - Tampa, FL, USA (1-3 June 1992)] IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - A Simple Analysis Of An Electrodeless Inductive Low Pressure Discharge Based On External Electrical Measurements

Piejak, R.B., Godyak, V.A., Alexandrovich, B.M.

Year:

1992

File:

PDF, 96 KB

1992

74

[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - EEDF evolution measurement in an inductive RF discharge

Godyak, V.A., Piejak, R.B., Alexandrovich, B.M.

Year:

1996

Language:

english

File:

PDF, 134 KB

english, 1996

75

Patching collisionless plasma and sheath solutions to approximate the plasma-wall problem

Sternberg, N., Godyak, V.

Journal:

IEEE Transactions on Plasma Science

Year:

2003

Language:

english

File:

PDF, 397 KB

english, 2003

76

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Practical Scaling of Multi-Frequency Capacitive Discharges for Etch Applications

Hoffman, Dan, Godyak, Valery, Yang, Jang Gyoo, Shannon, Steve

Year:

2005

Language:

english

File:

PDF, 984 KB

english, 2005

77

[IEEE IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - Tampa, FL, USA (1-3 June 1992)] IEEE Conference Record - Abstracts 1992 IEEE International Conference on Plasma - Numerical simulation of advanced RF plasma sources

Montalvo, E., Carrera, R., Lebrun, M., Pekker, L., Godyak, V.

Year:

1992

File:

PDF, 96 KB

1992

78

[IEEE IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Boston, MA, USA (3-5 June 1996)] IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science - Electrical conductivity in high frequency plasmas

Lister, G.G., Li, Y.-M., Godyak, V.A.

Year:

1996

Language:

english

File:

PDF, 134 KB

english, 1996

79

[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (19-22 May 1997)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Measurement and control of RF power in inductively coupled plasma

Alexandrovich, B.M., Godyak, V.A., Pejak, R.B.

Year:

1997

Language:

english

File:

PDF, 98 KB

english, 1997

80

[IEEE 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Santa Fe, NM, USA (6-8 June 1994)] Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Approximation Of The Bounded Plasma Model By The Plasma And The Sheath Models

Sternberg, N., Godyak, V.A.

Year:

1994

Language:

english

File:

PDF, 107 KB

english, 1994

81

[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - EEDF and plasma parameters in a spherical ICP

Godyak, V.A., Alexandrovich, B.M.

Year:

2003

Language:

english

File:

PDF, 68 KB

english, 2003

82

[IEEE IEEE 29th International Conference on Plasma Sciences - Banff, Alta., Canada (26-30 May 2002)] IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) - Electron heating reduction in inductively coupled plasma at conditions of the anomalous skin effect

Tyshetskiy, Yu.O., Smolyakov, A.I., Godyak, V.A.

Year:

2002

Language:

english

File:

PDF, 59 KB

english, 2002

83

[IEEE 25th International Conference on Plasma Sciences - Raleigh, NC, USA (1-4 June 1998)] 25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) - Nonlocal electrodynamics effects in ICPs

Godyak, V.A., Kolobov, V.I.

Year:

1998

Language:

english

File:

PDF, 105 KB

english, 1998

84

On nonlinear effects in inductively coupled plasmas

Smolyakov, A., Godyak, V., Duffy, A.

Journal:

Physics of Plasmas

Year:

2000

Language:

english

File:

PDF, 333 KB

english, 2000

85

On the consistency of the collisionless sheath model

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2002

Language:

english

File:

PDF, 279 KB

english, 2002

86

Simulations of ponderomotive effects in inductively coupled plasmas

Sydorenko, D. Y., Smolyakov, A. I., Tyshetskiy, Y. O., Godyak, V. A.

Journal:

Physics of Plasmas

Year:

2005

Language:

english

File:

PDF, 339 KB

english, 2005

87

[IEEE 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Santa Fe, NM, USA (6-8 June 1994)] Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Electrical Characteristics Of Capacitive Rf Discharges Over A Wide Frequency Range

Godyak, V.A., Piejak, R.B., Alexandrovich, B.M.

Year:

1994

Language:

english

File:

PDF, 108 KB

english, 1994

88

An experimental system for symmetric capacitive rf discharge studies

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.

Journal:

Review of Scientific Instruments

Year:

1990

Language:

english

File:

PDF, 795 KB

english, 1990

89

Second harmonic and ponderomotive forces acting on electrons in an inhomogeneous radio frequency field of an inductive discharge

R. B. Piejak, V. A. Godyak

Year:

2000

Language:

english

File:

PDF, 292 KB

english, 2000

90

Observation of Second Harmonic Currents in Inductively Coupled Plasmas

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.

Journal:

Physical Review Letters

Year:

1999

Language:

english

File:

PDF, 62 KB

english, 1999

91

Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.

Journal:

Physical Review Letters

Year:

1992

Language:

english

File:

PDF, 579 KB

english, 1992

92

Negative Power Absorption in Inductively Coupled Plasma

Godyak, V. A., Kolobov, V. I.

Journal:

Physical Review Letters

Year:

1997

Language:

english

File:

PDF, 153 KB

english, 1997

93

Dynamic model of the electrode sheaths in symmetrically driven rf discharges

Godyak, Valery A., Sternberg, Natalia

Journal:

Physical Review A

Year:

1990

Language:

english

File:

PDF, 882 KB

english, 1990

94

Electric field in inductively coupled gas discharges

Piejak, R., Godyak, V., Alexandrovich, B.

Journal:

Journal of Applied Physics

Year:

2001

Language:

english

File:

PDF, 281 KB

english, 2001

95

Validation of current density measurements with a B-dot probe

Piejak, R., Godyak, V., Alexandrovich, B.

Journal:

Review of Scientific Instruments

Year:

2001

Language:

english

File:

PDF, 312 KB

english, 2001

96

Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge

Godyak, V. A., Piejak, R. B., Alexandrovich, B. M.

Journal:

Journal of Applied Physics

Year:

1991

Language:

english

File:

PDF, 868 KB

english, 1991

97

Magnetic field distribution measurements in a low-pressure inductive discharge

Piejak, R., Godyak, V., Alexandrovich, B.

Journal:

Journal of Applied Physics

Year:

1995

Language:

english

File:

PDF, 1021 KB

english, 1995

98

Nonlinear effects in inductively coupled plasmas

Smolyakov, A. I., Godyak, V. A., Tyshetskiy, Y. O.

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 334 KB

english, 2003

99

[IEEE 2007 IEEE Pulsed Power Plasma Science Conference - Albuquerque, NM, USA (2007.06.17-2007.04.22)] 2007 IEEE Pulsed Power Plasma Science Conference - Two-Dimensional Collisionless Weakly-Ionized Plama in Fluid Approximation

Godyak, V., Sternberg, N.

Year:

2007

Language:

english

File:

PDF, 41 KB

english, 2007

100

[IEEE International Conference on Plasma Sciences (ICOPS) - Vancouver, BC, Canada (1993.06.7-1993.06.9)] International Conference on Plasma Sciences (ICOPS) - Anisotropy in EEDF of capacitive RF discharge

Godyak, V.A., Piejak, R.B.

Year:

1993

Language:

english

File:

PDF, 99 KB

english, 1993