Synthesis of 10-μm-Thick Lead Zirconate Titanate Films on...

International Journal of Applied Ceramic Technology 2006 Vol. 3; Iss. 6

Synthesis of 10-μm-Thick Lead Zirconate Titanate Films on 2-in. Si Substrates for Piezoelectric Film Devices

Takashi Iijima, Satoko Osone, Yoshiro Shimojo, Hideki Nagai
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Volume:
3
Year:
2006
Language:
english
Pages:
6
DOI:
10.1111/j.1744-7402.2006.02107.x
File:
PDF, 330 KB
english, 2006
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