THIN-FILM GAGE MARKERS FOR LASER-BASED STRAIN MEASUREMENT...

Experimental Techniques 1999 Vol. 23; Iss. 3

THIN-FILM GAGE MARKERS FOR LASER-BASED STRAIN MEASUREMENT ON MEMS MATERIALS

J.C. Fox, R.L. Edwards, W.N. Sharpe Jr.
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Volume:
23
Year:
1999
Language:
english
Pages:
3
DOI:
10.1111/j.1747-1567.1999.tb01567.x
File:
PDF, 541 KB
english, 1999
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