Thin dielectric films: Uncorrelated breakdown of integrated...

Thin dielectric films: Uncorrelated breakdown of integrated circuits

Alam, Muhammad A., Smith, R. Kent, Weir, Bonnie E., Silverman, Paul J.
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Volume:
420
Year:
2002
Language:
english
Pages:
1
DOI:
10.1038/420378a
File:
PDF, 92 KB
english, 2002
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