Development of LIGA process using a superconducting compact...

Electrical Engineering in Japan 1997 Vol. 120; Iss. 1

Development of LIGA process using a superconducting compact synchrotron light source

Hiroshi Takada, Yoshihiro Hirata, Hiroshi Okuyama, Toshiyuki Numazawa
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Volume:
120
Year:
1997
Pages:
9
DOI:
10.1002/(sici)1520-6416(19970715)120:13.0.co;2-p
File:
PDF, 1.01 MB
1997
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