![](/img/cover-not-exists.png)
Studies of the mechanism of boron nitride thin-film formation by means of nitrogen-argon gas mixture plasma jet
Yasushi Takakura, Shigeru Ono, Shinriki TeiiVolume:
120
Year:
1997
Pages:
6
DOI:
10.1002/(sici)1520-6416(199709)120:43.0.co;2-c
File:
PDF, 633 KB
1997