Liquid source chemical vapor deposition of high-dielectric-constant (Ba, Sr)TiO3 films
Takaaki Kawahara, Mikio Yamamuka, Akimasa Yuuki, Kouichi OnoVolume:
125
Year:
1998
Language:
english
Pages:
8
DOI:
10.1002/(sici)1520-6416(199810)125:13.0.co;2-j
File:
PDF, 3.30 MB
english, 1998