Development of large single-crystal SiC substrates

Electronics and Communications in Japan (Part II: Electronics)) 1998 Vol. 81; Iss. 6

Development of large single-crystal SiC substrates

Noboru Ohtani, Jun Takahashi, Masakazu Katsuno, Hirokatsu Yashiro, Masatoshi Kanaya
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Volume:
81
Year:
1998
Language:
english
Pages:
12
DOI:
10.1002/(sici)1520-6432(199806)81:63.0.co;2-h
File:
PDF, 7.00 MB
english, 1998
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