Electronics and Communications in Japan (Part III: Fundamental Electronic Science))
2000 Vol. 83; Iss. 8
A new figure fracturing algorithm for variable-shaped EB exposure-data generation
Hiroomi Nakao, Masayuki Terai, Koichi MoriizumiVolume:
83
Year:
2000
Language:
english
Pages:
16
DOI:
10.1002/(sici)1520-6440(200008)83:83.0.co;2-1
File:
PDF, 392 KB
english, 2000