Process-Structure-Reflectance Correlations for TiB2 Films Prepared by Chemical Vapor Deposition
Bruce N. Beckloff, W. Jack LackeyVolume:
82
Year:
1999
Language:
english
Pages:
10
DOI:
10.1111/j.1151-2916.1999.tb01794.x
File:
PDF, 875 KB
english, 1999