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Instability of an elastically compressed silicon surface under etching
Yu. G. Shreter, D. V. Tarkhin, S. A. Khorev, Yu. T. RebaneVolume:
41
Language:
english
Pages:
3
DOI:
10.1134/1.1130985
Date:
August, 1999
File:
PDF, 217 KB
english, 1999