![](/img/cover-not-exists.png)
Reduction of elastic strains in directly-bonded silicon structures
T. S. Argunova, R. F. Vitman, I. V. Grekhov, L. S. Kostina, T. V. Kudryavtseva, M. Yu. Gutkin, A. V. Shturbin, J. Härtwig, M. Ohler, E. D. Kim, S. Ch. KimVolume:
41
Language:
english
Pages:
9
DOI:
10.1134/1.1131099
Date:
November, 1999
File:
PDF, 507 KB
english, 1999