Effect of annealing in an atomic-hydrogen atmosphere on the...

Effect of annealing in an atomic-hydrogen atmosphere on the properties of amorphous hydrated silicon films and the parameters ofp-i-nstructures based on them

M. M. Mezdrogina, A. V. Abramov, G. N. Mosina, I. N. Trapeznikova, A. V. Patsekin
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Volume:
32
Language:
english
Pages:
7
DOI:
10.1134/1.1187437
Date:
May, 1998
File:
PDF, 336 KB
english, 1998
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