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Influence of SiO2protective films on the diffusion of atomic hydrogen during the hydrogenation of epitaxialn-GaAs
A. V. Panin, N. A. TorkhovVolume:
34
Language:
english
Pages:
6
DOI:
10.1134/1.1188053
Date:
June, 2000
File:
PDF, 458 KB
english, 2000