Bolometric properties of silicon thin-film structures fabricated by plasmachemical vapor-phase deposition
V. Yu. Zerov, Yu. V. Kulikov, V. G. Malyarov, N. A. Feoktistov, I. A. KhrebtovVolume:
23
Language:
english
Pages:
3
DOI:
10.1134/1.1261722
Date:
June, 1997
File:
PDF, 59 KB
english, 1997