Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance
S. Yu. Suzdal’tsev, S. V. Sysuev, R. K. YafarovVolume:
24
Language:
english
Pages:
3
DOI:
10.1134/1.1262024
Date:
February, 1998
File:
PDF, 242 KB
english, 1998