Long-range gettering of microdefects in silicon single...

Technical Physics Letters 1999 / 04 Vol. 25; Iss. 4

Long-range gettering of microdefects in silicon single crystals during the formation of porous silicon layers on their surface and ion irradiation

V. A. Perevoshchikov, V. D. Skupov
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Volume:
25
Language:
english
Pages:
2
DOI:
10.1134/1.1262464
Date:
April, 1999
File:
PDF, 71 KB
english, 1999
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