Electrical conductivity of silicon-on-insulator structures prepared by bonding silicon wafers to a substrate using hydrogen implantation
I. V. Antonova, V. F. Stas’, V. P. Popov, V. I. Obodnikov, A. K. GutakovskiiVolume:
34
Language:
english
Pages:
4
DOI:
10.1134/1.1309421
Date:
September, 2000
File:
PDF, 186 KB
english, 2000