Laser-induced implantation and diffusion of magnesium into...

Technical Physics 2001 / 02 Vol. 46; Iss. 2

Laser-induced implantation and diffusion of magnesium into silicon

V. M. Arutyunyan, A. P. Akhoyan, Z. N. Adamyan, R. S. Barsegyan
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Volume:
46
Language:
english
Pages:
4
DOI:
10.1134/1.1349276
Date:
February, 2001
File:
PDF, 54 KB
english, 2001
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