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The formation of volume elements for microelectromechanical systems in polyimide by method of reactive ion beam etching
A. I. Stognij, T. I. Orekhovskaya, Yu. V. Timoshkov, S. V. KoryakinVolume:
27
Language:
english
Pages:
3
DOI:
10.1134/1.1352757
Date:
February, 2001
File:
PDF, 328 KB
english, 2001