Silicon structures with dielectric insulation obtained by vertical anisotropic etching
E. G. Guk, A. G. Tkachenko, N. A. Tokranova, L. S. Granitsyna, E. V. Astrova, B. G. Podlaskin, A. V. Nashchekin, I. L. Shul’pina, S. V. RutkovskiiVolume:
27
Language:
english
Pages:
3
DOI:
10.1134/1.1376758
Date:
May, 2001
File:
PDF, 371 KB
english, 2001