The oxide layer charging in SIMOX structures

Technical Physics Letters 2001 / 05 Vol. 27; Iss. 5

The oxide layer charging in SIMOX structures

A. Yu. Askinazi, A. P. Baraban, V. A. Dmitriev, L. V. Miloglyadova
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Volume:
27
Language:
english
Pages:
2
DOI:
10.1134/1.1376771
Date:
May, 2001
File:
PDF, 32 KB
english, 2001
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