Transformation of interface states in silicon-on-insulator...

Semiconductors 2002 / 01 Vol. 36; Iss. 1

Transformation of interface states in silicon-on-insulator structures under annealing in hydrogen atmosphere

I. V. Antonova, I. Stano, D. V. Nikolaev, O. V. Naumova, V. P. Popov, V. A. Skuratov
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Volume:
36
Language:
english
Pages:
5
DOI:
10.1134/1.1434515
Date:
January, 2002
File:
PDF, 75 KB
english, 2002
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