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Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: I. Production of CF2and CF via electron-impact dissociation
V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, O. V. Proshina, A. T. Rakhimov, T. V. Rakhimova, G. B. RulevVolume:
28
Language:
english
Pages:
14
DOI:
10.1134/1.1458988
Date:
March, 2002
File:
PDF, 190 KB
english, 2002