Hydrogen sensitivity of a silicon Schottky diode increased by modification of the semiconductor surface microrelief
S. V. Tikhov, D. A. Pavlov, P. A. Shilyaev, E. L. Shobolov, A. A. Os’kinVolume:
28
Language:
english
Pages:
2
DOI:
10.1134/1.1482735
Date:
May, 2002
File:
PDF, 154 KB
english, 2002