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Numerical simulation of silane decomposition in an RF plasma
V. I. Strunin, A. A. Lyakhov, G. Zh. Khudaibergenov, V. V. ShkurkinVolume:
47
Language:
english
Pages:
7
DOI:
10.1134/1.1486201
Date:
June, 2002
File:
PDF, 86 KB
english, 2002