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Specific features in the generation and motion of dislocations in silicon single crystals doped with nitrogen
M. V. Mezhennyi, M. G. Mil’vidskii, V. Ya. ReznikVolume:
44
Language:
english
Pages:
6
DOI:
10.1134/1.1494622
Date:
July, 2002
File:
PDF, 69 KB
english, 2002