Variations in the properties of an implantation-synthesized SixNy-Si heterosystem as a result of thermal and ion-beam treatments
V. V. Karzanov, K. A. Markov, V. V. Sdobnyakov, E. S. DemidovVolume:
36
Language:
english
Pages:
5
DOI:
10.1134/1.1507278
Date:
September, 2002
File:
PDF, 154 KB
english, 2002