High-power gas-discharge EUV source

Plasma Physics Reports 2002 / 10 Vol. 28; Iss. 10

High-power gas-discharge EUV source

V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, S. V. Mironov, V. A. Mishchenko, A. V. Prokof’ev, O. B. Khristoforov
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Volume:
28
Language:
english
Pages:
5
DOI:
10.1134/1.1513842
Date:
October, 2002
File:
PDF, 65 KB
english, 2002
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