Isotope-pure28Si layers grown by VPE

Semiconductors 2002 / 12 Vol. 36; Iss. 12

Isotope-pure28Si layers grown by VPE

O. N. Godisov, A. K. Kaliteevsky, A. Yu. Safronov, V. I. Korolev, P. N. Aruev, B. Ya. Ber, V. Yu. Davydov, N. V. Zabrodskaya, V. V. Zabrodsky, M. A. Kaliteevsky, P. S. Kop’ev, A. P. Kovarsky, V. L. Su
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Volume:
36
Language:
english
Pages:
2
DOI:
10.1134/1.1529252
Date:
December, 2002
File:
PDF, 32 KB
english, 2002
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