Relaxation of a defect subsystem in silicon irradiated with...

Semiconductors 2003 / 05 Vol. 37; Iss. 5

Relaxation of a defect subsystem in silicon irradiated with high-energy heavy ions

S. A. Smagulova, I. V. Antonova, E. P. Neustroev, V. A. Skuratov
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Volume:
37
Language:
english
Pages:
5
DOI:
10.1134/1.1575358
Date:
May, 2003
File:
PDF, 68 KB
english, 2003
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