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Effect of microwave annealing on silicon dioxide/silicon carbide structures
Yu. Yu. Bacherikov, R. V. Konakova, A. N. Kocherov, P. M. Lytvyn, O. S. Lytvyn, O. B. Okhrimenko, A. M. SvetlichnyiVolume:
48
Language:
english
Pages:
4
DOI:
10.1134/1.1576474
Date:
May, 2003
File:
PDF, 144 KB
english, 2003