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Thin diamond films for integrated circuits
V. K. Belyi, V. P. Varnin, S. A. Gavrilov, É. A. Il’ichev, É. A. Poltoratskii, G. S. Rychkov, I. G. TeremetskayaVolume:
29
Language:
english
Pages:
2
DOI:
10.1134/1.1579801
Date:
May, 2003
File:
PDF, 65 KB
english, 2003