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Structure of a discharge induced by a coaxial microwave plasmatron with a gas-supply channel in the inner electrode
A. Ya. Kirichenko, A. P. Motornenko, O. A. SuvorovaVolume:
29
Language:
english
Pages:
6
DOI:
10.1134/1.1582521
Date:
June, 2003
File:
PDF, 121 KB
english, 2003