Analysis of macroparticle charging in the near-electrode layer of a high-frequency capacitive discharge
O. S. Vaulina, A. A. Samarian, B. James, O. F. Petrov, V. E. FortovVolume:
96
Language:
english
Pages:
8
DOI:
10.1134/1.1591215
Date:
June, 2003
File:
PDF, 105 KB
english, 2003