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Silicon-on-insulator nanotransistors: Prospects and problems of fabrication
O. V. Naumova, I. V. Antonova, V. P. Popov, Yu. V. Nastaushev, T. A. Gavrilova, L. V. Litvin, A. L. AseevVolume:
37
Language:
english
Pages:
7
DOI:
10.1134/1.1619522
Date:
October, 2003
File:
PDF, 246 KB
english, 2003