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A cavitation mechanism of material sputtering by slow multicharged ions
V. S. Vorob’ev, V. S. Lisitsa, S. P. MalyshenkoVolume:
78
Language:
english
Pages:
5
DOI:
10.1134/1.1625727
Date:
September, 2003
File:
PDF, 56 KB
english, 2003