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Formation of two-dimensional photonic-crystal structures in silicon for near-infrared region using fine focused ion beams
A. F. Vyatkin, E. Yu. Gavrilin, Yu. B. Gorbatov, V. V. Starkov, V. V. SirotkinVolume:
46
Language:
english
Pages:
3
DOI:
10.1134/1.1641915
Date:
January, 2004
File:
PDF, 396 KB
english, 2004