Kinetics of an RF low-pressure discharge with a condensed phase
V. I. Strunin, A. A. Lyakhov, G. Zh. Khudaibergenov, V. V. ShkurkinVolume:
49
Language:
english
Pages:
3
DOI:
10.1134/1.1736923
Date:
April, 2004
File:
PDF, 46 KB
english, 2004