The effect of thermal treatment on the structure of...

Technical Physics Letters 2004 / 05 Vol. 30; Iss. 5

The effect of thermal treatment on the structure of tantalum oxide films grown on titanium

V. A. Zhabrev, Yu. A. Bystrov, L. P. Efimenko, A. E. Komlev, V. G. Baryshnikov, A. A. Kolomiitsev, V. I. Shapovalov
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Volume:
30
Language:
english
Pages:
3
DOI:
10.1134/1.1760866
Date:
May, 2004
File:
PDF, 44 KB
english, 2004
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