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Low-Power RF plasma sources for technological applications: III. helicon plasma sources
K. V. Vavilin, A. A. Rukhadze, Kh. M. Ri, V. Yu. PlaksinVolume:
49
Language:
english
Pages:
7
DOI:
10.1134/1.1767876
Date:
June, 2004
File:
PDF, 116 KB
english, 2004