Interference nanolithography with a UV laser

Technical Physics 2004 / 09 Vol. 49; Iss. 9

Interference nanolithography with a UV laser

V. I. Bredikhin, V. N. Burenina, Yu. K. Verevkin, A. V. Kirsanov, V. N. Petryakov, N. V. Vostokov, V. F. Dryakhlushin, A. Yu. Klimov
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
49
Language:
english
Pages:
5
DOI:
10.1134/1.1800241
Date:
September, 2004
File:
PDF, 248 KB
english, 2004
Conversion to is in progress
Conversion to is failed