Atomic-force-microscopy visualization of Si nanocrystals in...

Semiconductors 2004 / 11 Vol. 38; Iss. 11

Atomic-force-microscopy visualization of Si nanocrystals in SiO2thermal oxide using selective etching

M. S. Dunaevskii, J. J. Grob, A. G. Zabrodskii, R. Laiho, A. N. Titkov
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Volume:
38
Language:
english
Pages:
6
DOI:
10.1134/1.1823054
Date:
November, 2004
File:
PDF, 256 KB
english, 2004
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