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Structure, impurity composition, and photoluminescence of mechanically polished layers of single-crystal silicon
R. I. Batalov, R. M. Bayazitov, N. M. Khusnullin, E. I. Terukov, V. Kh. Kudoyarova, G. N. Mosina, B. A. Andreev, D. I. KryzhkovVolume:
47
Language:
english
Pages:
4
DOI:
10.1134/1.1853431
Date:
January, 2005
File:
PDF, 191 KB
english, 2005