Magnetron sputter deposition of (SiC)1−x(AlN)xsolid solution films
M. K. Guseinov, M. K. Kurbanov, G. K. Safaraliev, B. A. BilalovVolume:
31
Language:
english
Pages:
2
DOI:
10.1134/1.1877627
Date:
February, 2005
File:
PDF, 35 KB
english, 2005