![](/img/cover-not-exists.png)
Effect of the transition layer on ellipsometric measurement of nanodimensional layers
D. I. Bilenko, V. P. Polyanskaya, M. A. Getsman, D. A. Gorin, A. A. Neveshkin, A. M. YaschenokVolume:
50
Language:
english
Pages:
5
DOI:
10.1134/1.1947351
Date:
June, 2005
File:
PDF, 120 KB
english, 2005