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The influence of oxygen on the formation of donor centers in silicon layers implanted with erbium and oxygen ions
O. V. Aleksandrov, A. O. Zakhar’in, N. A. SobolevVolume:
39
Language:
english
Pages:
6
DOI:
10.1134/1.1992626
Date:
July, 2005
File:
PDF, 80 KB
english, 2005