Optical characteristics of the plasma of a transverse...

Optical characteristics of the plasma of a transverse volume discharge in a Ne/Ar/SiH4mixture

A. K. Shuaibov
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Volume:
26
Language:
english
Pages:
3
DOI:
10.1134/1.952837
Date:
February, 2000
File:
PDF, 39 KB
english, 2000
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