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Plasma etching: From micro- to nanoelectronics
D. Shamiryan, V. Paraschiv, W. Boullart, M. R. BaklanovVolume:
43
Language:
english
Pages:
9
DOI:
10.1134/s0018143909030084
Date:
May, 2009
File:
PDF, 407 KB
english, 2009